1991 ~ 1995

I. Journal Papers

1.

T.S.Chao, C.L.Lee, and T.F.Lei, 1991, 
" Measurement of Ultra-thin(<100A° ) Oxide Film by Multiple-Angle Incidence Ellipsometry ", 
J. of Electrochemical Society
, Vol.138, pp.1756-1760, 1991

2.

C.L.Lee, T.F.Lei, J.H.Ho and W.T.Wang, 1991,
 " A Real-Time C-V Measurement Circuit for MOS Capacitors Under Current Stressing ",
 IEEE Trans. on Instr. & Measurement, Vol.40, 
pp.775-777, 1991

3.

S.L. Wu, C.L. Lee, T.F. Lei, and L.J. Chen, 1992,
 " Investigation on the Interface of the Polycrystalline Silicon Contacted Diode Formed with a Stacked Amorphous Silicon Film ", 
J. of Electronic Materials
, 21, pp.511-816, 1992

4.

W.L. Yang, T.F. Lei, C.T. Hwang, and C.L. Lee, 1992,
 " The Impact of Titianium Silicide on the Contact Resistance for Shallow Junction Formed by Out-Diffusion of Arsenic from Poly Silicon ",
 J. of App. Phys.
, 32, pp.399-403, 1992

5.

S.L.Wu, C.L. Lee, and T.F. Lei, 1992, 
" High-Performance Polysilicon Contacted Shallow Junction Formed by Stacked-Amorphous-Silicon Films ",
 IEEE Device Lett.
,EDL-13, pp.23-25, 1992

6.

T.S.Chao, C.L.Lee, and T.F.Lei, 1992, 
" A Study on the Interfacial Layer of Al and Al(1%Si)-Si Contacts by Using Zeroth-Layer Model of Ellipsometry ", Solid-State Electronics, 35, pp.1579-1584, 1992

7.

S.L.Wu, C.L.Lee, T.F.Lei, and M.S.Liang, 1992, 
" Characterization of Ultra-Thin Oxide Prepared by Low-Temperature Wafers Loading and Nitrogen Pre-Annealing before Oxidation ",
 J. of Appl. Phys.
, 72, pp.1378-1385 , 1992

8.

T.S. Chao, C.L. Lee, T.F. Lei, and Y.T. Yen, 1992, 
" Poly-Oxide/Poly-Si/SiO2/Si Structure for Ellipsometry Measurement ", 
IEE Electronics Letters
, 28, pp.1144-1145, 1992

9.

T.S.Chao, C.L.Lee and T.F.Lei, 1993, 
" The Refractive Index of InP and Its Oxide Measured by Multiple Angle Incident Ellipsometry ", 
J. of Materials Science Letts.
, Vol.12, pp.721-723, 1993

10.

T.S.Chao, C.L.Lee, and T.F.Lei, 1993, 
" Ellipsometry Study on Refractive Index Profiles of the SiO2/Si3N4/SiO2/Si Structure ",
 J. of Appl. Phys., 73, pp.1732-1736, 1993

11.

H.N.Chern, C.L.Lee and T.F.Lei, 1993,
 " H2/O2 Plasma on Polysilicon Thin Film Transistor ", 
IEEE Electron-Device Lett.
, 14, pp.115-117, 1993

12.

S.L.Wu, C.L.Lee and T.F.Lei, 1993, 
" Electrical Characteristics of Textured Polysilicon Oxide Prepared by a Low Temperature Wafer Loading and N2 Pre-Annealing Process ", 
IEEE Electron-Device Lett.
, 14, pp.115-116 , 1993

13.

S.L.Wu, C.L.Lee and T.F.Lei, 1993, 
" Characteristics of Polysilicon Contacted Shallow Junction Diode Formed with a Stacked Amorphous Silicon Film ", IEEE Trans. on Electron-Device, Vol. 40, pp.1797-1804, 1993

14.

S.L.Wu, C.L.Lee and T.F.Lei, 1993, 
" Ultrathin Textured Polycrystalline Oxide with High Electron Conduction Efficiency Prepared by Thermal Oxidation of a Thin Polycrystalline Silicon Film on n+ Polycrystalline Silicon ", Appl. Phys. Lett., 62, pp.3491-3492 , 1993

15.

T.S.Chao, C.L.Lee, and T.F. Lei, 1993, "
 Characterization of Semi-Insulation Polycrystalline Silicon (SIPOS) Prepared by Low-Pressure Chemical Vapor Deposition ", 
J. of Electrochem. Society
, Vol.140, pp.2645-2648, 1993

16.

S.L.Wu, C.L.Lee and T.F.Lei, 1993,
 " Tunnel Oxide Prepared by Thermal Oxidation of Thin Polysilicon Film on Silicon (TOPS) ",
 IEEE Trans. on Electron-Device Lett.
, EDL-14, pp.379-381, 1993

17.

S.L.Wu, C.L.Lee and T.F.Lei, 1993, 
" Thin Oxide Grown on a Heavily-Doped Substrate by Using a Low-Temperature Wafer Loading and N2 Preannealing Process ", 
Solid-State Electron.
, Vol. 36, pp.1725-1730, 1993

18.

H.N.Chern, C.L.Lee and T.F.Lei, 1993, 
" The Effects of H2-O2-Plasma Treatment of Polysilicon Thin Film Transistors ", 
IEEE Trans. on Electron-Device.
, Vol. 40, pp.2301-2306, 1993

19.

S.L.Wu, C.L.Lee and T.F.Lei, 1993, 
" Electrical Characteristics of a Stacked Nitride/ Micro- crystalline-Silicon/Oxide/Silicon Structure ",
 Appl. Phys. Lett., 63, pp.24-26, 1993

20.

T.S.Chao, C.L.Lee and T.F.Lei, 1993,
 "Thickness Determination of Poly-Si/Poly-Oxide/Poly-Si/ SiO2/Si Structure by Ellipsometry",
 Electronics Lett., Vol. 29, pp.1157-1159, 1993

21.

H.N.Chern, C.L.Lee and T.F.Lei, 1994, 
" Correlation of Polysilicon Thin Film Transistor Characteristics to Defect State via Thermal Annealing ",
 IEEE Trans. on Electron-Device.
, Vol. 40, pp.460-462, 1994

22.

H.N.Chern, C.L.Lee, and T.F.Lei, 1994, 
" The Effects of Fluorine Passivation on Polysilicon Thin Film Transistors ", 
IEEE Trans. on Electron Devices
, Vol-41, pp.698-702, 1994

23.

S.L.Wu, C.L.Lee, and T.F.Lei, 1994, 
" Enhancement of Oxide Break Up by Implantation of Fluorine in Poly-Si Emitter Contacted P+-N Shallow Junction Formation ",
 IEEE Electron Device Lett.
, Vol.15, pp.120-122, 1994

24.

H.N.Chern, C.L.Lee, and T.F.Lei, 1994, 
" Improvement of Polysilicon Oxide Characteristics by Fluorine Incorporation ", 
IEEE Electron Device Lett.
, Vol.15, pp.181-182, 1994

25.

S.L.Wu, C.L.Lee, T.F.Lei, L.F.Chen and L.J.Chen, 1994,
 " Suppression of the Boron Penetration Induced Si/SiO2 Interface Degradation by Using a Stacked-Amorphous-Silicon Film as the Gate Structure for pMOSFET ", 
IEEE Electron Device Lett.
, Vol.15, pp.160-162, 1994

26.

T.S.Chao, C.L.Lee, and T.F.Lei, 1994, 
" Multiple Angle Incident Ellipsometry Measurement on Low Pressure Chemical Vapor Deposited Amorphous Silicon and Poly Silicon ",
 J. of Electrochemical Society
, Vol. 141, pp.2146-2151, 1994

27.

C.K.Yang and C.L. Lee, T.F.Lei, 1994, 
"The Combined Effects of Low Pressure NH3-Annealing 
and H2 Plasma Hydrogenation on Polysilicon Thin Film Transistors", 
IEEE Electron Device Lett.
, Vol.15, pp.389-390, 1994

28.

T.S.Chao, T.F.Lei, C.Y.Chang and C.L.Lee, 1994, 
" Measurement of Thin Oxide Films on Implanted Si-Substrate by Ellipsometry ",
 Jpn. J. Appl. Phys.,33, pp.2031-2034, 1994

29.

W.C.Huang, T.F.Lei, and, C.L.Lee, 1994, " 
Pd-Ge Contact to n-GaAs with the TiW Diffusion Barrier ",
 J. of Electronic Materials, 23, pp.397-401, 1994

30.

Y.H. Lin, C.L. Lee, and T.F. Lei, 1995,
 " Thin Polyoxide on the Top of Poly-Si Gate to Suppress Boron Penetration for pMOS ",
 IEEE Electronic Device Lett.
, EDL-16, pp.164-165, 1995

31.

Y.H. Lin, C.L. Lee, and T.F. Lei, 1995, 
" Suppression of Boron Penetration in PMOS by Using Oxide Gettering Effect in Poly-Si Gate ",
 Jpn. J. of Appl. Phys., 34, pp.752-756, 1995

32.

W.C. Huang, T.F. Lei, and C.L. Lee, 1995, 
" A Double Metal Structure Pt/Al/n-InP Diode ", 
J. of Appl. Phys.
, 78(1), pp.291-294, 1995

33.

B. Chen and C.L. Lee, 1995, 
" Universal Test Set Generation for CMOS ", 
J. of Electronic Testing: Theory and Applications
, Vol.6, No.3, pp.313-323, 1995

34.

W.C. Huang, T.F. Lei, and C.L. Lee, 1995,
 " High Barrier Pt/Al/n-InP Diode ", 
Electronics Lett.
, 31(11), pp.924-925, 1995

36.

H.N. Chern, C.L. Lee, and T.F. Lei, 1995,
 " An Analytical Model for the above Threshold Characteristics of Polysilicon Thin-Film Transistors ",
 IEEE Trans. on Electron Devices
, 42(7), pp.1240-1246, 1995

37.

C.S. Lai, T.F. Lei, and C.L. Lee, 1995, 
" Enhanced H2-Plasma Defects on Polysilicon Thin-Film Transistors with Thin ONO Gate Dielectrics ",
 IEEE Electron Device Lett.
, Vol.16, pp.228-229, 1995

38.

Y.H. Lin, C.L. Lee, and T.F. Lei, 1995, 
" Nitridization of the Stacked Poly-Si Gate to Suppress the Boron Penetration in pMOS ", 
IEEE Electron Device Lett.
, Vol.16, pp.248-249, 1995

39.

B.W. Liu, Y.H. Wu, C.L. Lee, and T.F. Lei, 1995,
 " Thickness Effect on Hydrogen Plasma Treatment on Polycrystalline Silicon Thin Film ", 
Appl. Phys. Lett.
, 66(22), pp.3013-3014, 1995

40.

C.S. Lai, T.F. Lei, C.L. Lee, and T.S. Chao, 1995, 
" The Electrical Characteristics of Polysilicon Oxide Grown in Pure N2O ",
 IEEE Electron Device Lett., Vol.16, pp.385-386, 1995

41.

C.S. Lai, T.F. Lei, C.L. Lee, and T.S. Chao, 1995, 
" Post Polysilcon Gate-Induced Degradation on Thin Gate Oxide ",
 IEEE Electron Device Lett.
, EDL-16, pp.470-472, 1995

42.

B.W. Liu, C.L. Lee, and T.F. Lei, 1995,
 " High Breakdown Voltage Schottky Barrier Diode ", Electronics Letters, 31(22), pp.1950-1951, 1995

43.

C.K.Yang, C.L.Lee, T.F. Lei, and H.N.Chern, 1995,
 " Radiation Effects on N-Channel Polycrystalline Silicon Thin-Film Transistors ", 
Appl. Phys. Lett.
, 67(23), pp.3477-3479, 1995

44.

C.K.Yang, T.F. Lei, and C.L.Lee, 1995,
 " Characteristics of Top-Gate Thin-Film Transistors Fabricated on Nitrogen-Implanted Polysilicon Films ",
 IEEE Trans. on Electron Devices, 42(12), pp.2163-2196, 1995

II. Conference Papers

1.

W.L. Yang, J.J. Liaw, T.F. Lei, and C.L. Lee, 1991,
 "Study on Several Novel Technologies for Ultra-Shallow Junction Formation and the Evaluation of Their Electrical Characteristics",
 R.O.C. Electronic Devices and Material Symposium
, R.O.C., pp.71-75

2.

T.S. Chao, Y.T. Yen, C.L. Lee, and T.F. Lei, 1991, "Ellipsomery Measurement on the Poly-Oxide/Poly-Si/Oxide/Silicon Structures",
 R.O.C. Electronic Devices and Materials Symposium, pp.111-114

3.

W.L. Yang, T.F. Lei, J.T. Hwang, and C.L. Lee, 1992,
 "The Impact of Titanium Silicide on the Contact Resistance for Shallow Junction Formed by Out-Diffusion of Arsenic from Poly Silicon",
 Int. Conf. on Solid State Devices and Materials
, pp.413-415

4.

S.L.Wu, C.Y. Chen, C.L. Lee, T.F. Lei, and T.Y. Lin, 1992,
"Polarity Asymmetry of Electrical Characteristics of Textured Polysilicon Oxide Grown by a Low-Temperature Pre-Annealing Process" ,
Int. Conf. on Solid State and Integrated Circuit Tech.
, pp.119-121

5.

H.N. Chern, C.L. Lee, and T.F. Lei, 1992,
 "Effects of H2 and O2 Plasma on Polysilicon Thin Film Transistor (TFT)" ,
 Int. Conf. on Solid State and Integrated Circuit Tech.
, pp.573-575

6.

H.N. Chern, C.L. Lee, and T.F. Lei, 1992,
"The Effects of Active-Layer Thickness and Hydrogenation on Double Gate Polysilicon TFT",
 International Electronic Devices and Materials Symposium
, pp.165-169

7.

C.T. Huang, W.L. Yang, T.F. Lei, and C.L. Lee, 1992, "Study on Ti-Polycided P+-n Shallow Junctions Formed by Out-diffusion of BF2+ from Polysilicon",
International Electronic Devices and Materials Symposium
, pp.388-391

8.

T.S. Chao, C.L. Lee, and T.F. Lei, 1992,
"Ellipsometry Study on Refractive Index Profiles of the SiO2/Si3N4/SiO2/Si (ONO) Structure,"
 Int. Conf. on Solid State Integrated Circuit Tech., pp.305-307

9.

S.L. Wu, C.L. Lee, and T.F. Lei, 1992,
"Characteristics of Polysilicon Contacted Shallow Junction Diode Formed with a Stacked-Amorphous-Silicon Film",
Int. Conf. on Solid State and Integrated Circuit Tech.
, pp.208-210

10.

T.S. Chao, W.H. Chen, J.H. Ho, H.Y. Chang, S.C. Sun, T.F. Lei, and C.L. Lee, 1993,
"Characterization the Interfacial Layer of N2O Oxide by Using Ellipsometer and FTIR",
 Int. Conf. on Solid State Devices and Materials
, pp.636-638

11.

W.L. Yang, T.F. Lei, and C.L. Lee, 1993,
"Hydrogenation Effects on the Specific Contact Resistivity of Al (1% Si) and TiSi2 Contact to the Polysilicon",
Int. Conf. on Solid State Devices and Materials
, pp.633-635

12.

S.L. Wu, C.L. Lee, and T.F. Lei, 1993,
"Suppression of Boron Penetration into an Ultra Thin Gate Oxide (
7 nm) by Using a Stacked-Amorphous-Silicon (SAS) Film",
Digest. International Electronic Devices Meeting
, pp.329-332.

13.

H.N. Chen, C.L. Lee, and T.F. Lei, 1993,
"An Analytical Mode for the above-Threshold Characteristics of Polysilicon Thin Film Transistors",
Symp. on Semiconductor-Modeling and Simulation
, pp.67-68

14.

C.K. Yang, T.F Lei, and C.L. Lee, 1994,
 "The Characteristics of Ammonia-Annealed Polysilicon Thin-Film Transistors with Plasma Hydrogenation", International Electron. Device and Material Symposium, pp.17-20

15.

T.S.Chao, C.H.Chu, C.F.Wang, T.F.Lei, and C.L.Lee, 1994,
 "Suppression of Boron Penetration in BF2+-Implanted Poly-Si Gate Using N2O and Stacked-Amorphous-Silicon (SAS) Structure",
 Int. Electron Devices and Material Symposium
, pp.12-13

16.

C.K. Yang, T.F. Lei, and C.L. Lee, 1994,
"Improved Electrical Characteristics of Thin-Film Transistors Fabricated on Nitrogen-Implanted Polysilicon Films", International Electron Device Meeting, pp.505-508

17.

C.L. Lee, H.N. Chern, M.S. Liao, and H.M. Wang, 1995, "On Designing of 4-Valued Memory With Double-Gate TFT",
1995 International Symposium on Multi-Valued Logic
, pp.187-192